WaferTech Wafer Fabrication Facilities Complex

The 887,900-square-foot wafer fabrication facilities complex is dedicated to the fabrication of 200mm submicron line width geometrics microelectronics devices. The focus of the facilities is a 297,000-square-foot cleanroom with a ballroom layout of process equipment within minienvironment enclosures. The complex also includes a clean process area, process support systems and labs and warehouse functions.

Other facilities at the complex include the office tower, 150-000-square-foot central plant, chemicals storage, waste treatment and site security installations.

Fluor provided comprehensive architectural and engineering systems design, procurement and on-site construction management services for the complex.