The Fab 3 was a 79,000-square-foot facility dedicated to the fabrication of eight-inch wafers at submicron geometries. The 26,000-square-foot Class 1,000 wafer process area was equipped with Class 1 minienvironment tool enclosures. The building encompassed a three-level structure with a clean subfab level, 6,500-square-foot central plant and 10,000-square-foot process support utilities mechanical and electrical equipment area.
ADP Marshall, at the time a Fluor company, provided a full spectrum of design-build services, from process tool layouts with utilities requirements through a phased design and fast track construction delivery methodology, concluding with process tool hook-up design and installation of 120 tools.
Construction started in 1994 and continued for 14 months without disruption to existing semiconductor manufacturing, assembly and test operations.